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Leybold-Heraeus Blower Vacuum Pump Stack RUVAC WAU500/DK100

Leybold-Heraeus RUVAC WAU500/DK100 Blower Vacuum Pump Stack, with 3hp blower and 5hp vacuum pump. This is a classic vacuum blower and pump stack as is often used on semiconductor process equipment.


Manufactured by Leybold-Heraeus in US and Germany
Model WAU500/DK100 stack
SN 1184140084M and 1184030002
3 hp, 3 phase, 230 volt motor on the WAU500
5 hp 3 phase 230 volt motor on the DK100

CA Inventory # 5994

Sold Out
  • Cavlon Item No. 5994
  • Model: WAU500/DK100
  • Shipping Weight: 1725lbs
  • 0 Units in Stock

This product was added to our catalog on Thursday 21 May, 2015.

Please contact us at (505) 569-1027 or email

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